Development, Production and Characterization of a Polymer-based Ultrasonic Transducer for Use in Chemical Sensing

The aim of this project is to develop chemical sensors that establish a new sensor concept by integrating sensitive materials on capacitive micromachine ultrasonic transducers (CMUT). The detection of gases and vapors is particularly addressed as an application. To ensure high sensitivity of this new type of sensor, the movable membrane is also realized using a highly flexible polymer membrane. This new sensor principle promises a high level of miniaturization, compatibility with established wafer-level technologies and the possibility of realizing sensor arrays and pattern recognition.

Duration: 09/2019 - 08/2022

Funding: funded by the European Social Fund Plus (ESF Plus) and the Free State of Saxony, respectively, as well as the Fraunhofer Institute for Electronic Nano Systems ENAS

Partner: Fraunhofer Institute for Electronic Nanosystems ENAS