manufacturer: Jeol Ltd.

technical specifications:

• electron probe microanalysis for wavelength and energy dispersive analytics
• LaB₆- or W-cathode as electron source
• optical microscope with colour TV camera for the selection of the area of interest in the sample
• secondary electron and back-scattered electron detectors for imaging and configuration of the measurement area
• 5 crystal spectrometers with different crystals 
• EDX system
• accelleration voltage from 5 keV to 30 keV
• continuous adjustment of the beam current between 1 pA and 10 µA
• LN₂ cooling trap for an improved vacuum and reduced contamination rate
• extensive set of metallic and mineralogic standards

typical applications:

• local, quantitative elemental analysis for elements with atomic number > 5
• measurement of elemental distributions along lines or in areas of interest