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Dual beam system FEI Helios NanoLab 600i

  • Scanning electron microscope (SEM)
    • High-resolution imaging
    • Thermal Schottky field emission source
  • Additional focussed ion beam (FIB)
    • Surface modification
    • Focused ion beam (FIB)field emission source
  • additional focused ion beam (FIB)
    • surface modification
    • gallium source

Equipment:

  • Detectors:
    • Everhart-Thornley detector
    • In-Lens detector (secondary electrons and backscattered electrons)
    • ICE detector (Ion Conversion and Electron)
    • Retractable DBS backscatter detector
    • EDX-Detector for energy dispersive X-ray analysis (EDAX company)
    • EBIC amplifier (Electron Beam Induced Current)
    • IR CCD camera for sample chamber view

       

  • Gas injection system (GIS) for spatially resolved deposition of:
    • platinum
    • carbon
    • insulator (TEOS) by means of a gas inlet system possible
    • 2 additional ports for retrofitting

       

  • micromanipulators:
    • simultaneous use of one to four micromanipulators from Kleindiek
    • targeted tapping and injection of currents on the samples with the 4 micromanipulators
    • with the use of a micromanipulator, the display of a current image is possible (Electron Beam Induced Current - EBIC)

       

  • integrated plasma cleaner for surface cleaning of the samples

Further information

  • User regulations for download
  • Contact: Dr Claudia Funke (Tel. 2084, claudia [dot] funke [at] physik [dot] tu-freiberg [dot] de (claudia[dot]funke[at]physik[dot]tu-freiberg[dot]de))