An extensive range of building services is required to operate the cleanroom laboratory. Some of the systems are briefly presented here:
![Employee operates the touchscreen of the gas control system](/sites/default/files/styles/max_325x325/public/2023-11/tubaf_gassteuerung.jpg?itok=PBPug4hV)
Gas control system
18 different technical gases can be used in the central cleanroom laboratory, 14 of which are currently in use. They are monitored and controlled by a gas control and warning system and numerous sensors. If a leak is detected, the system is switched off immediately, eliminating any risk to employees and the environment.
![Exhaust gas combustion system with combustion cell and pipes](/sites/default/files/styles/max_325x325/public/2023-11/tubaf_brenner_w.jpg?itok=G_HZ4O3i)
Exhaust gas afterburning system
The process exhaust air from some separation and etching systems contains substances that must not be released into the environment and require special after-treatment. These exhaust gases are fed into a very hot flame and incinerated. Subsequent washing with diluted NaOH ensures the separation of the combustion residues.
![Heat recovery system with circulation pumps and control unit](/sites/default/files/styles/max_325x325/public/2023-12/20231214_145100.jpg?itok=1r9eUTRw)
Heat recovery
Some processes require high exhaust air volume flows. The ventilation systems are equipped with heat recovery systems to conserve resources.
![Exhaust air cross-flow scrubber](/sites/default/files/styles/max_325x325/public/2023-11/tubaf_luftwaescher.jpg?itok=hnE21mmd)
Exhaust air scrubber
The process exhaust air from wet chemistry is cleaned in a wet scrubber. Its waste water and that from chemical processes is treated in a central neutralisation tool.