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Cleanroom laboratory - Welcome to the cleanest place at the university

For work and experiments that require a particle-free environment, the university operates a cleanroom laboratory that is used for teaching and research. The Central Cleanroom Laboratory (CCL) at TU Bergakademie Freiberg is located in a side wing of the Gellert Building, which houses the physics institutes.

Equipment

There are numerous technologies available for the production of microelectronic components.

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Wafer is placed in exposure system
Structuring
Lithography and nano-plotter
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Sputtering system in the clean room laboratory
Deposition processes
Chemical and physical deposition, atomic layer deposition
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Wet chemistry bench in the clean room laboratory
Wet chemistry
Chemistry laboratory for semiconductor components
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RTP oven with open flap and glowing interior
Thermal processing
Annealing under different atmospheres
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Plasma etching system in the clean room laboratory
Plasma etching
Etching without acid bottle
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Four-point measuring station with PC in the clean room laboratory
Measuring devices + glove box
Characterisation of layers and structures
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Exhaust gas combustion system with combustion cell and pipes
Operating technology
Building services for supply and exhaust gas cleaning
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Drone image of the cleanroom building
Tour
Our devices presented one after the other