Deposition of conductive layers on (scanning microscope) samples by sputtering a suitable metal layer.
Image
INBM
Bal-Tec SCD-050
- Vacuum: 5 x 10-2 hPa
- Targets: Al, Au, Au-Pd, Cu, Pt, Ti
- Max. sample diameter: 10 cm
- Location: CWB 2.306
Contact
Jörg Adam
INBM, Gustav-Zeuner-Str. 3, R. 102
09599 Freiberg
joerg.adam [at] nbm.tu-freiberg.de
+49 3731 39-4378