Dual beam system FEI Helios NanoLab 600i
- Scanning electron microscope (SEM)
- High-resolution imaging
- Thermal Schottky field emission source
- Additional focussed ion beam (FIB)
- Surface modification
- Focused ion beam (FIB)field emission source
- additional focused ion beam (FIB)
- surface modification
- gallium source
Look into the laboratory
FIB: FEI Helios NanoLab 600i im Überblick
FIB: Geöffnete Probenkammer
FIB: Elektronen- und Ionenoptik sowie Detektoren in der Messkammer
FIB-Arbeitsplatz für Bedienung und Auswertung
FIB: Ankippen der Probenbühne
Equipment:
- Detectors:
- Everhart-Thornley detector
- In-Lens detector (secondary electrons and backscattered electrons)
- ICE detector (Ion Conversion and Electron)
- Retractable DBS backscatter detector
- EDX-Detector for energy dispersive X-ray analysis (EDAX company)
- EBIC amplifier (Electron Beam Induced Current)
IR CCD camera for sample chamber view
- Gas injection system (GIS) for spatially resolved deposition of:
- platinum
- carbon
- insulator (TEOS) by means of a gas inlet system possible
2 additional ports for retrofitting
- micromanipulators:
- simultaneous use of one to four micromanipulators from Kleindiek
- targeted tapping and injection of currents on the samples with the 4 micromanipulators
with the use of a micromanipulator, the display of a current image is possible (Electron Beam Induced Current - EBIC)
- integrated plasma cleaner for surface cleaning of the samples
Application examples
FIB: SiC-Nanowire mit angelagerten Kristalliten
FIB Vierspitzenmessung an einem einzelnen SiC-Nanowire
FIB: Electron Beam induced current in Teststruktur
FIB: Löcher in einer Lithiumniobat-Sol-Gel-Schicht
FIB: Überwachsener SiC-Nanowire
FIB: Zinkoxid-Nanokristalle
FIB zukünftige TEM-Lamelle am Prober
Further information
- User regulations for download
- Contact: Dr Claudia Funke (Tel. 2084, claudia [dot] funke [at] physik [dot] tu-freiberg [dot] de (claudia[dot]funke[at]physik[dot]tu-freiberg[dot]de))