Semiconductor Materials


Dr. rer. nat. Olf Pätzold

Dr. rer. nat. Olf Pätzold

Deputy institute director, Semiconductor materials (Working Group Leader)

Ledebur-Bau, Zimmer E 23

Telefon +49 3731 39-2767
olf [dot] paetzoldatinemet [dot] tu-freiberg [dot] de

Fields of Activity

  • Growth of semiconductor crystals from melt and vapour phase
  • Growth of elemental and compound semiconductors, e. g. (Al)GaN, GaAs, Ge, Si
  • Flow and solidification experiments with model melts
  • Preparation and characterization of semiconductor materials 

Technical Equipment

  • Furnaces for VGF crystal growth of Ge and GaAs monocrystals using magnetic fields 
  • Induction furnace for Si crystal growth
  • HTVPE reactor for the growth of GaN layers from vapour phase
  • Sessile Drop facility to determine the contact angle and surface tension of semiconductor and metal melts
  • Clean rooms and facilities for cleaning and preparation of materials and modules as well as for the metallographic characterization of semiconductor materials
  • Optical microscopy for characterization of materials via correlative and confocal microscopy 
  • Secondary Neutral Mass Spectrometry for chemical characterization of semiconductor materials
  • High resolution scanning electron microscope with EDX and WDX
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  • VGF-Ofen mit wanderndem Magnetfeld © INEMET
  • GaN-Anlage © INEMET
  • Induktions - Schmelzanlage © INEMET
  • Modellexperiment © INEMET
  • Sessile Drop - Anlage © INEMET
  • Plasma-Sekundär-Neutralteilchen-Massenspektrometer © INEMET