73. BHT: Fachkolloquium 1

Freiberg Silicon Days (Freiberger Siliciumtage)

  • Datum: 9.-10. Juni 2022
  • Konferenzort: in Präsenz, Clemens-Winkler-Bau, Hörsaal WIN-1005, Leipziger Str. 29
  • Sprache: Englisch
  • Leitung: Prof. Dr. Edwin Kroke, Prof. Dr. Johannes Heitmann, Prof. Dr. Daniel Hiller
  • Kontakt: Aline Schneider (sekretariat [dot] iapatphysik [dot] tu-freiberg [dot] de)
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For about two decades, the Freiberg Silicon Days were organized every two years within the framework of the BHT - Freiberger Universitätsforum. After an extra break last year, we are happy to invite you again to this two-day conference on recent developments in silicon-based photovoltaics, silicon nano-electronics and chemical-physical processing of silicon-based devices.

The Freiberg Silicon Days 2022 will feature a number of dedicated sessions ranging from silicon chemistry to device physics and the role of crystal defects for semiconductor applications. With a broad range of invited renowned speakers from both industry and academic institutions, this conference serves as a hub connecting basic research and industry-relevant topics.

Poster contributions from the participants are appreciated.


Please register at the Conference Office (Building ZeHS, Winklerstr. 5)

Donnerstag, 9. Juni 2022

8.30–8.50 Arrival

8.50–9.00 Welcome

9.00–10.15 Opening Session – chair: D. Hiller

9.00 Dopingless Silicon for Nanoelectronics Devices / Joachim Knoch (RWTH Aachen)

9.25 Liquid Phase Deposition of Silicon-Heterostructures using Single Source Precursors / Michael Haas (TU Graz)

9.50 The renaissance of photovoltaic manufacturing in Europe / Gunter Erfurt (Meyer Burger Technology AG)

10.15–10.45 Break

10.45–12.20 Session Photovoltaics – chair: M. Müller

10.45 Recent Progress of Q Cells‘ High Efficiency Solar Cell Development / Jörg Müller (Hanwha Q Cells)

11.10 Monolithic perovskite/silicon tandem solar cells: Lab status and upscaling progress / Bernd Stannowski (Helmholtz-Zentrum Berlin)

11.35 Challenges and progress in mass production of silicon solar cells / Pietro Altermatt (Trina Solar, Changzhou)

12.00 Local passivating contacts from laser doped p+ polysilicon / Florian Buchholz (ISC Konstanz)

12.20–13.45 Lunch

13.45–15.05 Session Recycling – chair: E. Kroke

13.45 Silicon recycling along the photovoltaic production chain / Wolfram Palitzsch (LuxChemtech)

14.05 Recycling of PV Systems – Challenges and Opportunities / Karsten Wambach (bifa Augsburg)

14.25 Tackling challenges in WEEE recycling and the removal of hazardous substances in the frame of European funded research / Ronny Hanich et al. (Fraunhofer ICT Pfinztal)

14.45 Helios lab: a multi-sensor system for the real-time characterization of complex recycling materials / Richard Gloaguen (Helmholtz Institute Freiberg for Resource Technology)

15.05–15.45 Break

15.45–17.15 Session Surface treatment and structuring – chair: E. Kroke

15.45 Methods for Si etching bath analysis / André Stapf (TU Bergakademie Freiberg)

16.05 Deterministic doping through self assembly materials: control of dopant positioning with nanometer accuracy / Michele Perego (IMM-CNR, Agrate Brianza)

16.25 Atomic Layer Etching (ALE) for semiconductor device manufacturing and patterning by ALE Pitch Splitting (APS) / Jonas Sundqvist (Alixlabs)

16.45 Atomic Layer Processing for Silicon Nanostructures and Devices / Martin Knaut (TU Dresden)

17.05 Exhibitor Presentations

17.05 SENTECH Gesellschaft für Sensortechnik mbH

17.09 Freiberg Instruments GmbH

17.13 Bruker-AXS GmbH

17.17 Ocean Optics BV

17.21 Park Systems Europe GmbH

17.25 Chemical Abstract Service

17.30–18.00 Poster Session


  • Inkjet printable boron-doped silicon particle ink / Marco Fritsch, Sindy Mosch, Mykola Vinnichenko, Mihails Kusnezoff, Zohreh Kiaee and Roman Keding (Fraunhofer IKTS)
  • The Quest for Big Silicon Nanoparticles: Investigating Anomalous High Temperature Hydrogen Silsesquioxane Thermal Processing / Kevin. M. O'Connor, Abbie Rubletz, Dr. Jonathan Veinot (University of Alberta)
  • Journey to the Center of the Nanoparticle: Insights from 29Si NMR / Riley Hooper, Alyxandra N. Thiessen, Michelle Ha, Haoyang Yu, Anton O. Oliynyk, Jonathan G.C. Veinot, and Vladimir K. Michaelis (University of Alberta)
  • Characterization of FD HKMG SOI stacks through standard FETs / Teimuraz Mchedlidze, Jörg Weber, Johannes Heitmann (TU Bergakademie Freiberg)
  • GaAs - High Power Devices / Tobias Urban, Volker Dudek (3-5 Power Electronics GmbH)
  • Silicon Solar Modules Recycling: Step Towards Circular PV Economy / Dr. Tetyana Konovalova; Leilani Lotti Diaz; Dr. Karin Faerber; Dr. Qiongqiong X Zhou (ACS International, Ltd.)
  • ALD-TiO2 using TiCl4 as Passivating Contact Material for Silicon Solar Cells / I. Ratschinski, S. Peddamalla, P. Häussermann, D. Hiller (TU Bergakademie Freiberg)
  • Technology platform for ferroelectric nanowire transistors / Tom Mauersberger, Jens Trommer, Martin Knaut, Ulrich Kentsch, Darius Pohl, Bernd Rellinghaus, Thomas Mikolajick, André Heinzig (TU Dresden)
  • GeSn Nanocrystals embedded in TaZrOx / Florian Honeit, Jan Beyer, Christian Röder, Johannes Heitmann (TU Bergakademie Freiberg)
  • DIGISORT - Digitalisierung mechanischer Sortierprozesse beim mechanischen Batterierecycling: Evaluierung spektroskopischer Methoden / Roman Tschagaew, Christian Röder, Jan Beyer, Johannes Heitmann (TU Bergakademie Freiberg)
  • E-Beam Lithography Nanostructure Fabrication for Transport Measurement / M. Sc. Soundarya Nagarajan, Prof. Dr.-Ing. Thomas Mikolajick, Dr.-Ing. Jens Trommer (NaMLab gGmbH)
  • TCAD Simulation of Electrical Characteristics of Silicon Tunnel Junctions for Monolithically Integrated Silicon/Perovskite Tandem Solar Cells / Guilherme Gaspar, J. M. Serra, Jonas Kern, Matthias Müller (Universidade de Lisboa, TU Bergakademie Freiberg)
  • FRay - A Free From Freiberg Ray tracer for the PV community / Matthias Müller, Tobias Urban, Pietro P. Altermatt, Johannes Heitmann (TU Bergakademie Freiberg)
  • Electron Transfer Reactions of Acylgermanes: A New Synthon for Custom-Made Photoinitiators / Michael Haas (TU Graz)
  • HF-HBr-Br2-Mixtures for Wet Chemical Etching of Silicon Wafers / Nils Schubert, André Stapf and Edwin Kroke (TU Bergakademie Freiberg)
  • Alternative to Classical Doping in Low Nanoscale Silicon / Michael Frentzen, Dirk König, Ke Ran, Noel Wilck, Stefan Scholz, Birger Berghoff, Joachim Mayer, Daniel Hiller, Joachim Knoch (RWTH Aachen)
  • Random inverted Pyramidal Texturing of Monocrystalline Silicon Wafers by Spray-Etching with HF-(HCl)-Cl2 Mixtures / Niklas Zomack, André Stapf, Carmen Bellmann, Kristin Halbfaß, Bernd Neubert, Edwin Kroke (TU Bergakademie Freiberg)
  • Automated multi-modal Weibull distribution & lifetime
    extrapolation / prediction algorithm for 2-D and 3-D MIM capacitors / Konstantinos Efstathios Falidas, Maximilian Everding, Alison Erlene Viegas, Malte Czernohorsky, Johannes Heitmann (Fraunhofer IPMS)
  • Research activities on the volume growth of Silicon and its related materials at IKZ-Berlin / R. Radhakrishnan Sumathi, Robert Menzel, Frank‐Michael Kießling, Christiane Frank-Rotsch, Karoline Stolze (IKZ Berlin)
  • Automated Charge Transport Mechanism Algorithms for Polarized Materials / Alison Viegas, Maximilian Everding, Konstantinos Falidas, Malte Czernohorsky, Johannes Heitmann (Fraunhofer IPMS)
  • Perhydridosilanes revisited / Georg Franze, Edwin Kroke (TU Bergakademie Freiberg)

from 18.00 Get-together with barbecue (foyer and outside Winkler building)

Freitag, 10. Juni 2022

9.00–9.15 Arrival and Welcome

9.15–10.15 Session Nano-Silicon I – chair: D. Hiller

9.15 Optical properties of single silicon nanoobjects studied by micro-spectroscopy techniques / Jan Valenta (Charles University Prague)

9.45 Bridging the Classical-Quantum Divide with Implanted Ions: Engineered Donors in Enriched Silicon / David Jamieson (University of Melbourne) 

10.15–10.45 Break

10.45–12.15 Session Precursor Chemistry – chair: E. Kroke

10.45 A novel-type polysilazane derived oxidation protection coating for refractory metal alloy / Plinio Furtat (Uni Magdeburg)

11.15 Combination of silazanes with organic polymers for processing of ceramic materials with exceptional properties / Günter Motz (Universität Bayreuth)

11.35 Accelerated moisture-curing of polysilazanes for functional coating applications / Ying Zhan (TU Darmstadt)

11.55 Si nanoparticles from chlorosilane hydrolysates / Georg Franze (TU Bergakademie Freiberg)

12.15–13.45 Lunch

13.45–15.15 Session Nano-Silicon II – chair: D. Hiller 

13.45 Redesigning Computing by Runtime Reconfigurable Nanometer Scale Silicon and Germanium Transistors / Walter Weber (TU Wien)

14.15 Improving Performance of Lithium-Ion Battery Anodes with Si/C-based Materials / Julia Lyubina et al. (Evonik Operations GmbH)

14.35 Epitaxial growth of SiGeSn films on virtual Ge substrates for integrated device technology / Jörg Schulze (Fraunhofer IISB, Erlangen)

14.55 The good, the bad, and the ugly of monolayer doping for silicon nanostructures / Ray Duffy (Tyndall National Institute, Cork)

15.15–15.20 Concluding Remarks

15.20 Coffee


Die Freiberger Silicon Days finden an zwei aufeinanderfolgenden Tagen statt. Eine eintägige Teilnahme ist möglich. Für dieses Kolloquium können wir Sonderkonditionen anbieten.

Preise inkl. MwSt.zweitägige Teilnahmeeintägige Teilnahme
Vollzahlende260 €160 €

Studierende* anderer Hochschulen

155 €96 €

Menschen in Rente

155 €96 €



Beschäftigte der TU Bergakademie Freiberg

40 €20 €

Studierende* der TU Bergakademie Freiberg

Kostenfrei, Versorgung ist bei Präsenzteilnahme ist nicht vorgesehen. Wenn sie die Tagungsversorgung in Anspruch nehmen möchten, können Sie die Anmeldung für Beschäftigte der TU Bergakademie Freiberg nutzen.

Beschäftigte des Sächsischen Oberbergamts und des Helmholtz-Instituts Freiberg

50 €30 €
*Studierende: beinhaltet Promotionsstudium und Gasthörerschaft


  • Die Preise beinhalten das Rahmenprogramm.
  • Rabatte können nur gewährt werden, wenn die teilnehmenden Personen einen Nachweis erbringen, dass sie einer der berechtigten Teilnahmegruppen angehören.
  • Aufgrund von eingeschränkten Raumkapazitäten kann die Zahl kostenfreier Plätze für Studierende der TU Bergakademie Freiberg begrenzt sein.

Call for Posters

Colloquium participants are encouraged to submit poster contributions on their recent work relevant to the scientific scope of the colloquium. Posters should be A0 size, portrait format. Poster walls and pins will be provided. 

Please note
If you want to submit a poster contribution for the Freiberg Silicon Days 2022, please fill in the required information here. By submitting (clicking "Absenden"), you agree that we may collect, sort, save, process, use, compare, query the information you have provided. The data will be deleted as soon as the purpose is fulfilled. This consent can be withdrawn at any time in whole or in part. The revocation of consent does not affect the legality of the processing carried out on the basis of the consent until the revocation.